gray powder(s); used in the form of a 99.5%–99.95% pure material as a sputtering target in the fabrication of integrated circuits; there is also the compound Ta5Si3, 12067-56-0 [STR93] [CER91]
Uses
Tantalum disilicide is used in the preparation of ceramics, which finds application in the thermal protection systems.
TANTALUM SILICIDE Preparation Products And Raw materials