TETRAKIS(DIMETHYLAMINO)ZIRCONIUM

TETRAKIS(DIMETHYLAMINO)ZIRCONIUM Basic information
Product Name:TETRAKIS(DIMETHYLAMINO)ZIRCONIUM
Synonyms:ZIRCONIUM TETRAKIS(DIMETHYLAMIDE);ZIRCONIUM DIMETHYLAMIDE;TETRAKIS(DIMETHYLAMIDO)ZIRCONIUM(IV);TETRAKIS(DIMETHYLAMINO)ZIRCONIUM;TETRAKIS(DIMETHYLAMINO)ZIRCONIUM(IV);TETRAKIS(DIMETHYLAMIDO)ZIRCONIUM(IV), 99.99+%, ELECTRONIC GRADE;TETRAKIS(DIMETHYLAMINO)ZIRCONIUM(IV) C&;Tetrakis(dimethylamino)zirkonium
CAS:19756-04-8
MF:C8H24N4Zr
MW:267.53
EINECS:629-068-5
Product Categories:ALD Precursors;metal amide complex
Mol File:19756-04-8.mol
TETRAKIS(DIMETHYLAMINO)ZIRCONIUM Structure
TETRAKIS(DIMETHYLAMINO)ZIRCONIUM Chemical Properties
Melting point 57-60 °C(lit.)
Boiling point 80°C 0,1mm
Fp >65℃
storage temp. 2-8°C
form solid
Sensitive moisture sensitive, store cold
Hydrolytic Sensitivity8: reacts rapidly with moisture, water, protic solvents
Safety Information
Hazard Codes F,Xi
Risk Statements 11-14/15-36/37/38
Safety Statements 16-26-36-43
RIDADR UN 3396 4.3/PG 2
WGK Germany 3
TSCA No
HS Code 29310099
MSDS Information
ProviderLanguage
SigmaAldrich English
ACROS English
TETRAKIS(DIMETHYLAMINO)ZIRCONIUM Usage And Synthesis
Chemical PropertiesPale yellow-greenish crystalline solid
UsesPrecursors Packaged for Depositions Systems
UsesTetrakis(dimethylamido) zirconium (IV) may be used as a precursor for atomic layer deposition of zirconium which find applications ranging from gas sensors to high-k dielectrics in microelectronics.
General DescriptionAtomic number of base material: 40 Zirconium
TETRAKIS(DIMETHYLAMINO)ZIRCONIUM Preparation Products And Raw materials
TETRAKIS(DIMETHYLAMINO)TIN Trityl tetrakis(pentafluorophenyl)borate TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV) TETRAKIS(ACETONITRILE)SILVER(I) TETRAFLUOROBORATE Tetrakis(triphenylphosphine)nickel TETRAKIS(DIMETHYLAMINO)TITANIUM TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM TETRAKIS(DIETHYLAMINO)ZIRCONIUM Vanadium tetrakis(dimethylamide) Germanium dimethylamide TETRAKIS(DIETHYLAMINO)HAFNIUM (PMe3)4Ru(Cl)(OAc) Tetrakis(ethylmethylamino)vanadium(IV) TETRAKIS(DIETHYLAMINO)TITANIUM TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM

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