TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM

TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Basic information

Product Name:	TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
Synonyms:	TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM;ZIRCONIUM TETRAKIS(ETHYLMETHYLAMIDE);Tetrakis(ethyl Methyl amido) zirconium;tetrakis(ethylmethylamido)zirconium(iv);tetrakis(ethylmethylamino)zirconium(iv);Tetrakis(ethylmethylamino)zirconium(IV) 99%, 40-1710, contained in 50 ml Swagelok cylinder for CVD/ALD;Tetrakis(ethylmethylamido)zirconium(IV), 99% TEMAZ, 40-1710, contained in 50 ml Swagelok cylinder for CVD/ALD;Tetrakis(ethylmethylamino)zirconium 99.999%
CAS:	175923-04-3
MF:	C12H32N4Zr
MW:	323.63
EINECS:
Product Categories:	ALD Precursors;metal amide complex
Mol File:	175923-04-3.mol

TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Chemical Properties

Boiling point	81 °C0.1 mm Hg(lit.)
density	1.049 g/mL at 25 °C(lit.)
Fp	50 °F
form	liquid
color	light yellow
Specific Gravity	1.049
Hydrolytic Sensitivity	8: reacts rapidly with moisture, water, protic solvents
Sensitive	Air & Moisture Sensitive

Safety Information

MSDS Information

Provider	Language
SigmaAldrich	English

TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Usage And Synthesis

Uses	Precursors Packaged for Depositions Systems
General Description	Atomic number of base material: 40 Zirconium

TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Preparation Products And Raw materials

According to the laws, regulations and policies related to "patent products", the sale of this product is prohibited!

ChemicalBook prompt

The patent owner or licensee of the product has not released any relevant information for the time being.

+Add Attachment (File Format: Jpg, Gif, Png, PDF,Zip,Txt,doc or xls Max Size: 3MB)

Login