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| | TETRAKIS(DIMETHYLAMINO)TITANIUM Basic information |
| Product Name: | TETRAKIS(DIMETHYLAMINO)TITANIUM | | Synonyms: | Tetrakis(dimethylamino)titanium(IV), 99% TDMAT, 93-2240, contained in 50 ml Swagelok cylinder for CVD/ALD;Tetrakis(dimethylamino)titanium, (trace metal basis), 99.99%;Tetrakis(dimethylamino)titanium(IV), 99% TDMAT;Tetrakis(diMethylaMino)titaniuM, 99.99%, (trace Metal basis);Tetrakis(diMethylaMino)titaniuM, 99.99% 25GR;Tetrakis(DiMethylaMino)TitaniuM (Metals Basis);Tetrakis(diMethylaMino)titaniuM, 99.99% Metals basis;Tetrakis(diMethylaMido)titaniuM(IV) 99.999% trace Metals basis | | CAS: | 3275-24-9 | | MF: | C2H7NTi | | MW: | 92.95 | | EINECS: | 221-904-3 | | Product Categories: | metal amide complex;ALD Precursors;Classes of Metal Compounds;Ti (Titanium) Compounds;Transition Metal Compounds | | Mol File: | 3275-24-9.mol |  |
| | TETRAKIS(DIMETHYLAMINO)TITANIUM Chemical Properties |
| Hazard Codes | F,C,Xi | | Risk Statements | 11-14-34 | | Safety Statements | 16-26-36/37/39-43-45 | | RIDADR | UN 3398 4.3/PG 1 | | WGK Germany | 3 | | TSCA | Yes | | HazardClass | 4.3 | | PackingGroup | II | | HS Code | 29319090 |
| | TETRAKIS(DIMETHYLAMINO)TITANIUM Usage And Synthesis |
| Chemical Properties | clear yellow to orange liquid | | Uses | Tetrakis(dimethylamido)titanium(IV) (TDMAT) is a precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD)and titanium dioxide thin films by atomic layer deposition (ALD).TDMAT undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV). | | Uses | Precursors Packaged for Depositions Systems | | General Description | Atomic number of base material: 22 Titanium |
| | TETRAKIS(DIMETHYLAMINO)TITANIUM Preparation Products And Raw materials |
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