DISILANE

DISILANE Basic information
Product Name:DISILANE
Synonyms:DISILANE;DISILANE, 99.998%, ELECTRONIC GRADE;disilicoethane;Si2H6;Silicoethane;DISILANE, 99.9+%;B silane
CAS:1590-87-0
MF:H6Si2
MW:62.22
EINECS:216-466-5
Product Categories:Chemical Synthesis;CVD and ALD Precursors by Metal;Materials Science;Micro/NanoElectronics;Specialty Gases;Synthetic Reagents;Vapor Deposition Precursors;Chemical Synthesis;Compressed and Liquefied GasesVapor Deposition Precursors;Gases;Precursors by Metal;Synthetic Reagents
Mol File:1590-87-0.mol
DISILANE Structure
DISILANE Chemical Properties
Melting point -132°C
Boiling point -14,5°C
density 0,686 g/cm3
Fp <10°C
form colorless gas
Specific Gravity0.686
Water Solubility soluble CS2, ethanol, benzene [MER06]
Hydrolytic Sensitivity10: reacts extremely rapidly with moisture and oxygen - may be pyrophoric - sealed system required
Merck 13,3391
Stability:Pyrophoric. Reacts violently with oxidizers and halogens. May form explosive mixtures with air.
InChIKeyPZPGRFITIJYNEJ-UHFFFAOYSA-N
CAS DataBase Reference1590-87-0
EPA Substance Registry SystemDisilane (1590-87-0)
Safety Information
Hazard Codes F,Xn
Risk Statements 17-20/21-36/37/38-42
Safety Statements 16-24-26-36/37/39
RIDADR 2203
WGK Germany 3
TSCA No
HazardClass 2.1
MSDS Information
DISILANE Usage And Synthesis
Chemical Propertiescolourless gas with a foul odour
UsesPrecursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.1
DefinitionChEBI: Disilicon is an elemental silicon.
DISILANE Preparation Products And Raw materials
1,2-DIMETHYL-1,1,2,2-TETRAPHENYLDISILANE DODECAMETHYLCYCLOHEXASILANE Hexakis(4-methylphenyl)disilane DISILANE 1,3-DI(P-T-BUTYLPHENETHYL)TETRAMETHYL-DISILANE OCTAPHENYLCYCLOTETRASILANE 1,1,2,2-TETRAPHENYLDISILANE DIVINYLTETRAMETHYLDISILANE 1,1,2,2-Tetramethyl-1,2-di(isopropyloxy)disilane 1 1 2 2-TETRAISOPROPYLDISILANE 97 1,1,2-TRIMETHYLDISILANE HEXAMETHYL-D18-DISILANE 1,2-DICHLOROTETRAMETHYLDISILANE Disilane, hexachloro- Disilane, 1,1,2,2-tetramethyl- 1,1,1-TRIMETHYLDISILANE 1,1,1-TRIMETHYL-2,2,2-TRIPHENYLDISILANE Methylchlorodisilanes.(Mixed)

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